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Multi-6" MBE production system

With its 4x6-inch (9x4-inch) wafer capacity per run, the Riber MBE 6000 system has been designed for volume production of GaAs-based PHEMT, HBT, and MESFET device epiwafers. Its field proven reliability and its capability of fully automated performance allows for 24 hour a day, 7 day a week operation, thus providing the world's lowest per-wafer cost of production. Today, the MBE 6000 system has the largest installed base of any 4x6" MBE system, all vendors included. Since its introduction to the market in 1998, more than 20 MBE 6000 systems have been ordered by captive and merchant suppliers of epiwafers to the telecom and wireless device industries. These sales position Riber as the supplier-of-choice for the compound semiconductor industry and demonstrate the high regard best-in-class companies hold for Riber's epi technology.

Key features include

Fully qualified for volume production
40x6" and 90x4" wafers per cassette load
Eleven large-capacity MBE source ports
Fully motorized wafer handling and transfer
Fully automated epi process (Crystal™)
Field-proven results and reliability
Easy installation and quick start-up
Riber worldwide support.

For full specifications, please contact us

  Multi-1" Multi-2" Multi-3" Multi-4" Multi-6" Multi-8"
CdHgTe Epineat Epineat        
InSb Epineat Epineat        
ZnSe Epineat Epineat        
GaAs Epineat MBE49 MBE49 MBE49 MBE6000 MBE7000
InP Epineat MBE49 MBE49 MBE49 MBE6000  
GaN Epineat Epineat MBE49 MBE49    

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