Dopant Effusion Cell:
Please contact us to find the best suitable
model for your needs: webrequest@episerve.de
* Low thermal inertia/low volume/uniform beam distribution
* High thermal efficiency (limits outgassing)
* Crucible volume and shape tailored to dopant evaporation
* Optional integrated cooling/shutter
* Compatible with commonly used power units
* Modular design
* Double thermocouple
Responses of a usual (conventional) dopant cell and an ADDON 12 cc dopant cell for a 100°C temperature step
Small and High Capacity Dopant Cell power consumption
Dopant Cell responses at various temperatures (72 cc)
The cells for dopants must match specific requirements different from those for main materials: i.e. low quantities of source materials; evaporation at high temperature and a rapid reaction to a set point variation are often required. It is, therefore, better to use a cell specially designed for this purpose. ADDON presents three cells for dopants corresponding to the three classes of commonly used systems:
* Monosubstrate: diameter 10 to 75 mm: crucible
5 cc (I.D. = 20mm) and 10° tap
* Multisubstrate platen: diameter max. 120 mm: 12 cc (I.D. = 26mm) and 10°
tap
* Production Multisubstrate platen: diameter max. 360 mm: 72 cc (I.D. =
51mm) and 13° tap
A low load is installed in these large diameter/large angle crucible cells to give a uniform flux. Furthermore, the combination of this low load with a suitable configuration of heating elements and thermal shielding gives a rapid response to temperature increases. In addition, the shutter position does not influence the temperature within the crucible.
Compatibility:
The cell exists in models fully compatible with existing systems manufactured
by Varian, VG, Perkin-Elmer, DCA, Anelva and Riber. Other versions are available
as an option (please provide us with details of flange size, connecting
tube I.D. and in vacuum length).
Thermocouples:
The C type (W/Re 5/26%) is provided, unless there are special requirements.
Power Units and Temperature
Controller:
Most existing power units are compatible. ADDON models are recommended if
a new power unit is needed.
Crucibles:
5, 12 and 72 cc crucibles are available, depending on the MBE system or
application. The size of the crucible is calculated to achieve a uniformity
of better than 1 %.
Specifications
Filament: 1 filament
Maximum 0perating temperature: 1500 °C
Maximum outgassing temperature: 1600 °C
Temperature stability: better than +/- 0.1 °C
Thermocouples: Double C type (W Re 5/26%)
Minimum mounting flange: for crucible capacity 5, 12 ccm 35CF / 70mm / 2.75", for crucible capacity 72 ccm 63CF / 114 mm / 4.5" higher capacities on request
In-vacuum diameter: Crucible O.D plus 0.2 mm
In-vacuum length: 200 to 400 mm. (other on request)
Temperatures / power consumption: See curves
Power supply connectors: System or ADDON via universal UNIPLUG
Options:-Other types of thermocouples, integrated cooling circuit, integrated
shutter, inserts
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